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Communication dans un congrès

Cavity flow controlled with an array of magneto-mechanical micro-valves

Thomas Arnoult, Cécile Ghouila-Houri, Colin Leclercq, Aurélien Mazzamurro, Romain Viard, Eric Garnier, Denis Sipp, Alain Merlen, Abdelkrim Talbi, Philippe Pernod

This paper presents and discusses micro-magneto-mechanical valves designed for cavity flow control. Realized using microfabrication techniques and rapid prototyping, the micro-valves exhibit a small footprint and adequate performances for low-speed cavity flow control. An array of 15 micro-valves…

2021 IEEE Sensors, Oct 2021, Sydney, Australia. pp.1-4, ⟨10.1109/SENSORS47087.2021.9639871⟩. ⟨hal-03501259⟩

Article dans une revue

Optimization of Reactive-Ion Etching (RIE) parameters to maximize the lateral etch rate of silicon using SF6/N2 gas mixture: An alternative to etching Si in MEMS with Au components

Munique Kazar Mendes, Cécile Ghouila-Houri, Serria Hammami, Thomas Arnoult, Philippe Pernod, Abdelkrim Talbi

In this work, the effects of the N2 addition to the SF6 plasma used in the isotropic silicon etching of Microelectromechanical systems (MEMS) with Au components are investigated. A four-variables Doehlert design was implemented for optimizing the etching parameters (power, pressure, gas flow rate,…

Materials Letters, 2021, 285, pp.129058. ⟨10.1016/j.matlet.2020.129058⟩. ⟨hal-03330078⟩

Communication dans un congrès

Polydimethylsiloxane micro-channels application for the study of dynamic wetting of nano-etched silicon surfaces based on acoustic characterization method

Abbas Salhab, Julien Carlier, Pierre Campistron, M. Neyens, Malika Toubal, Bertrand Nongaillard, V. Thomy

Efficient cleaning of contaminations in the semiconductor industry is a determining factor in ensuring the good quality of the electronics products. We present here the dynamic wetting characterization of a fluid on top of Deep Trench Isolation (DTI) structures using ultra-high frequency acoustic…

15th International Symposium on Ultra Clean Processing of Semiconductor Surfaces, UCPSS 2021, Session 6 - Wet processing in narrow spaces and pattern collapse, Apr 2021, Virtual, Unknown Region. pp.143-149, ⟨10.4028/www.scientific.net/SSP.314.143⟩. ⟨hal-03362264⟩

Communication dans un congrès

Evolution of localized surface plasmon resonance made of gold nanowire chain embedded in WS2multilayers

Z. Oumekloul, Y. Achaoui, A. Mir, Abdellatif Akjouj

Recently, the transition metal dichalcogenides (TMDs) have emerged as a new class of building blocks for engineering enhanced plasmonic sensors. This class of materials can be made with a low production cost and can be easily hybridized with metallic nanoparticles whereby desired molecules are…

4th International Conference on Materials and Environmental Science, ICMES 2020, Nov 2020, Oujda, Morocco. pp.7507-7510, ⟨10.1016/j.matpr.2021.02.259⟩. ⟨hal-03362269⟩

Article dans une revue

First-principles thermal transport in amorphous Ge 2 Sb 2 Te 5 at the nanoscale

Thuy-Quynh Duong, Assil Bouzid, Carlo Massobrio, Guido Ori, Mauro Boero, Évelyne Martin

Achieving a precise understanding of nanoscale thermal transport in phase change materials (PCMs), such as Ge 2 Sb 2 Te 5 (GST), is the key of thermal management in nanoelectronics, photonic and neuromorphic applications using non-volatile memories. By resorting to a first-principles approach to…

RSC Advances, 2021, 11 (18), pp.10747-10752. ⟨10.1039/d0ra10408f⟩. ⟨hal-03169059⟩

Chapitre d'ouvrage

17 - Interface Response Function in Layered Photonic Materials

Abdellatif Akjouj, L. Dobrzynski, Gaëtan Lévêque, El Houssaine El Boudouti

The interface response theory was presented for any composite material in discrete, continuous, and mixed (partly discrete \textendash partly continuous) spaces (see Chapter 1 of Phononics in Interface Transmission Tutorial Book Series). The aim of this chapter is to show how this theory can be…

Photonics, Part Three: Photonic Materials, Elsevier, pp.439-488, 2021, 978-0-12-819388-4. ⟨10.1016/B978-0-12-819388-4.00028-9⟩. ⟨hal-03360004⟩

Chapitre d'ouvrage

14 - One-Dimensional Photonic Waveguide for Filtering and Demultiplexing

Yan Pennec, Bahram Djafari-Rouhani, Abdellatif Akjouj, El Houssaine El Boudouti, Gaëtan Lévêque, L. Dobrzynski

In this chapter, we review numerical simulations of light propagation in one-dimensional photonic semiconductor optical waveguides coupled to one or several lateral stubs. In the presence of one stub, we show that the transmission spectrum contains several narrow dips, provided that the boundaries…

Photonics, Part 2: Photonic Circuits, Elsevier, pp.373-391, 2021, 978-0-12-819388-4. ⟨10.1016/B978-0-12-819388-4.00024-1⟩. ⟨hal-03359905⟩

Article dans une revue

Two Ensemble-CNN Approaches for Colorectal Cancer Tissue Type Classification

Emanuela Paladini, Edoardo Vantaggiato, Fares Bougourzi, Cosimo Distante, Abdenour Hadid, Abdelmalik Taleb-Ahmed

In recent years, automatic tissue phenotyping has attracted increasing interest in the Digital Pathology (DP) field. For Colorectal Cancer (CRC), tissue phenotyping can diagnose the cancer and differentiate between different cancer grades. The development of Whole Slide Images (WSIs) has provided…

Journal of Imaging, 2021, 7 (3), pp.51. ⟨10.3390/jimaging7030051⟩. ⟨hal-03558172⟩

Article dans une revue

Magnetically driven superhydrophobic/superoleophilic graphene-based polyurethane sponge for highly efficient oil/water separation and demulsification

A. Jamsaz, E.K. Goharshadi, Alexandre Barras, M. Ifires, Sabine Szunerits, Rabah Boukherroub

Cost-effective and efficient sorbents with emulsion-breaking capability, especially surfactant-stabilized emulsions, are required to remediate oil spills from water. Herein, in situ growth of magnetic Mn0.01Co0.90Fe3O4 (MCFO) nanoparticles (NPs) on reduced graphene oxide (RGO) was performed to…

Separation and Purification Technology, 2021, 274, pp.118931. ⟨10.1016/j.seppur.2021.118931⟩. ⟨hal-03546306⟩

Article dans une revue

Single-charge effects in silicon nanocrystals probed by atomic force microscopy: From charge blinking to nanocrystal charging

Thierry Melin, D. Deresmes

We investigate the electrical properties of individual silicon nanocrystals (NCs) by means of atomic/electrostatic force microscopy at atmospheric pressure, with the sensitivity of the elementary charge. Using a tip bias close to the sample surface potential for the sample topography imaging, NCs…

Journal of Applied Physics, 2021, 130 (6), pp.065103. ⟨10.1063/5.0054744⟩. ⟨hal-03347251⟩