Publications

• Article dans une revue

Reactive ion etching of a 20 nanometers tungsten gate using a SF$_6$/N$_2$ chemistry and hydrogen silsesquioxane hard mask resist

G. Larrieu, Emmanuel Dubois

This article reports on a direct method for patterning a tungsten gate in the decananometric range using high-resolution electron-beam lithography and reactive ion etching (RIE). Electron-beam lithography is based on the use of hydrogen silsesquioxane for its remarkable properties as a negative-…

Journal of Vacuum Science and Technology, 2005, 23 (5), pp.2046-2050. ⟨10.1116/1.2050654⟩. ⟨hal-00125635⟩

• Communication dans un congrès

Formation of nano-domains in SAMs of long chain alkyltrichlorosilanes deposited on silicon

S. Desbief, L. Patrone, D. Goguenheim, D. Vuillaume

8th European Conference on Molecular Electronics, ECME8, 2005, Bologna, Italy. ⟨hal-00125600⟩

• Communication dans un congrès

Piezoelectric micro-machined ultrasonic transducer (pMUT) for energy harvesting

Karim Dogheche, B. Cavallier, P. Delobelle, L. Hirsinger, S. Ballandras, Eric Cattan, Denis Remiens, M. Marzencki, B. Charlot, Skandar Basrour

Micro-electromechanical devices dedicated to energy scavenging purpose have yield an increasing interest for a few years. In this paper we report on the fabrication of PZT/Si piezoelectric micro-machined ultrasonic transducers (pMUT) first designed to ultrasonic imaging applications that may be…

Ultrasonics Symposium, 18-21 Sept., Sep 2005, Rotterdam, Netherlands. pp.939 - 942, ⟨10.1109/ULTSYM.2005.1603005⟩. ⟨hal-00079975⟩

• Communication dans un congrès

Close infrared thermography using an intensified CCD camera : application in nondestructive high resolution evaluation of electrothermally actuated MEMS

B. Serio, J.J. Hunsinger, F. Conseil, P. Derderian, D. Collard, L. Buchaillot, M.F. Ravat

2005, pp.819-829. ⟨hal-00147502⟩

• Article dans une revue

Terahertz radiation from heavy-ion-irradiated In0.53Ga0.47As photoconductive antenna excited at 1.55 µm

N. Chimot, J. Mangeney, L. Joulaud, P. Crozat, H. Bernas, K. Blary, Jean-Francois Lampin

Applied Physics Letters, 2005, 87, pp.193510-1-3. ⟨hal-00162806⟩

• Autre publication scientifique

Optimisation de la correction de biais dans le récepteur PIC multi-étages pour le système CDMA

M. Moussaoui

2005. ⟨hal-00162808⟩

• Communication dans un congrès

Terahertz emission from nanometric HEMTs analyzed by noise spectra

J.F. Millithaler, L. Varani, C. Palermo, J. Mateos, T. Gonzalez, S. Perez, D. Pardo, W. Knap, J. Lusakowski, N. Dyakonova, S. Bollaert, A. Cappy

Terahertz emission from nanometric HEMTs analyzed by noise spectra, 2005, Salamanca, Spain. pp.335-338, ⟨10.1063/1.2036763⟩. ⟨hal-00154896⟩

• Article dans une revue

High performances of InP channel power HEMT at 94 GHz

F Medjdoub, M. Zaknoune, X. Wallart, Christophe Gaquière, D. Theron

Electronics Letters, 2005, 41, pp.1406-1408. ⟨hal-00154912⟩

• Article dans une revue

Air-bridge interconnection and bondpad process for non-planar compound semiconductor devices

G. Ulliac, S. Garidel, Jean-Pierre Vilcot, P. Tilmant

Microelectronic Engineering, 2005, 81, pp.53-58. ⟨hal-00125664⟩

• Communication dans un congrès

Nouveaux microcapteurs thermiques en technologie silicium pour des applications en automobile

M. Haffar, M. Ait-Hammouda Yala, K. Ziouche, P. Godts, Didier Leclercq

Galerie de la Recherche et de l'Innovation, 2005, Marcq en Baroeul, France. ⟨hal-00126736⟩